Abstract
La-modified lead titanate (PLT) thin films were deposited on Pt/SiO/sub 2//Si substrates by spin coating with sol-gel processing. 1,3-propandiol was used as solvent to minimize the number of cycles of spin coating and drying processes to obtain the desired thickness of high quality thin film. The randomly oriented PLT thin film exhibits a relatively small dielectric constant and a large pyroelectric coefficient without poling treatment. Pyroelectric infrared (IR) detectors have been fabricated without the back side etching process The pyroelectric characteristics of point detectors with various La contents as a function of modulation frequency are compared. It was found that the PLT(10) detector has a large voltage responsivity of 3330 (V/W) at 20 Hz. The specific detectivity (D*) at 100 Hz is 6.2/spl times/10/sup 7/ cmHz/sup / 1/2 //W. The results showed that Pb/sub 1-x/La/sub x/Ti/sub 1-x/4/O/sub 3/ thin film with x=0.10 [PLT(10)] was most suitable for use as a pyroelectric IR detector.
Published Version
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