Characterization of small-scale batch-fabricated carbon nanofiber probes

Abstract

Linear-shaped single carbon nanofibers (CNFs) were batch-grown onto commercially available Si cantilevers for atomic force microscope by the Ar+-ion-irradiation method (9 cantilevers/batch). The force-curve measurements revealed that the long CNF probes (~ 1 μm in length) were as flexible as the carbon nanotubes probes, whereas the short CNF probes (~ 400 nm in length) were characterized by the rigid nature similar to the Si probes. Thus, the mechanical properties of CNF probes were controllable by the CNF length. The ion-induced CNF probes were metallic in electrical property, and the higher resolution images in scanning spreading resistance microscopy was attained by the CNF probes than by conventional conductive diamond probes, due to the small tip radius, high aspect ratio and the durability of the CNF probes. Because the small-scale batch-fabricated CNF probes showed good uniformity in the size, mechanical and electrical properties, it was concluded that they are promising as practical conductive SPM probes.