Abstract
In this study the anodization performance of probe nanolithography on titanium is investigated with a noncontact atomic force microscope (AFM) with both conductive and carbon nanotube (CNT) probes. The topographies and heights of nanodots and nanolines produced at different voltages, hold times, pulse durations, and writing speeds are studied. The results show that under stationary anodization, the CNT probe is generally better than the conductive probe in terms of its efficiency with regard to voltages, hold time and pulse duration. However, under mobile anodization of nanolines, the CNT probe is worse due to bending. Keywords: Atomic force microscopy, carbon nanotube (CNT), local electrochemical nanolithography, growth mechanism, nanostructure
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