Characterization of SiC-platelets

Abstract

Three fractions of SiC platelets were characterized using polarizing microscopy, X-ray diffraction, high resolution Auger electron spectroscopy (AES), electron spectroscopy for chemical analysis (ESCA) and scanning electron microscopy with energy dispersive analysis (SEM/EDX). The chemical analysis of the three fractions is given. The determination of the SiC polytypes (4H, 6H, 15R, 3C) was done and has been correlated with the chemical analysis. The results of the X-ray diffraction investigations confirm the polarizing microscopy observations. Using microanalytical techniques important conclusions about the impurity elements (e.g. B, Al, Fe) and their local distribution could be drawn. Most of them were found to be present on the outermost surfaces of the platelets. Some conclusions concerning the processing of the platelets are suggested.