Abstract
alloy formation and its influence on (PZT) film growth during liquid-delivery metallorganic chemical vapor deposition (MOCVD) of ferroelectric PZT thin films on Pt electrodes are investigated. When an excessive amount of Pb precursor and a deficient amount of oxygen are supplied during MOCVD at temperatures near , Pb diffuses along the grain boundaries into the Pt substrate, causing the formation of an alloy layer. Compared to a thicker Pt electrode , a thinner Pt substrate enhances the alloy layer formation due to the higher diffusion of Pb along the more abundant Pt grain boundaries. The alloy layer enhances the Pb incorporation into the PZT film and improves the crystallization of the PZT layer on top due to better structural compatibility between PZT and the alloy. When the deposition temperature is the alloy formation is initiated in the early stage of the film deposition but undergoes thermal decomposition in the later stage . Therefore, a constant Pb concentration is obtained after the initial decrease for a deposition period .
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
