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Abstract
We present three examples to illustrate the use of backscattering spectrometry to determine film stoichiometry, areal density, and impurity levels in optical coatings. Helium-ion beams with energies in the 1.5-5.0-MeV range were used to analyze (1) a magnesium fluoride coating, (2) a tungsten/silicon multilayer soft x-ray mirror, and (3) a trilayer optical data storage film.
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