Abstract
The evolution and characterization of nitrogen N2 in amorphous CNx (a-CNx) have been studied by using gas effusion spectroscopy. In gas effusion spectra for a-CNx thin films, N2 evolution peaks are found near 200, 400, 600 and 700°C. The N2 peak near 200°C disappears after hydrogen plasma treatment. In the gas effusion spectrum of H2 for a sample treated by hydrogen plasma, a very small shoulder would be found near the temperature of the H2 evolution peak in chemical vapor deposited diamond. By ultra-violet irradiation, the amplitudes of the N2 evolution peaks above 400°C increase and the x=N/C ratio obtained by X-ray photo-electron spectroscopy increases from 0.5 to 0.7. From these results and comparison with other works, the origin of the N2 evolution peaks near 200 and 400°C could be estimated as N2 related to a graphite-like structure and N2 from CN, respectively, and either N2 evolution near 600°C or near 700°C, or both, could be related to CN bonds.
Published Version
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