Abstract
Referring to the characterization of nanoscale multilayers in cross section, the resolution limits of the EDXS method have been investigated. For that purpose EDXS line scan profiles of nanoscale Fe-Cr multilayers have been calculated assuming an increased specimen thickness and different tilts between electron beam and layer interface. The resolution limit seems to be greater than 2 nm layer thickness for regular multilayers. Experimentally a limit of 5 nm was reached.
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