Abstract
Measurement and instrument noise as proposed in ISO 25178-600 and defined in ISO 25178-700 are assumed to be both stationary and randomly distributed. This paper presents the temporal and lateral Allan deviation as useful tools for deeper noise analysis in surface topography measurements. The temporal Allan deviation may be used to identify and qualify drift and spikes in the mean topography, which makes averaging over longer times no longer beneficial to reduce measurement noise. The lateral Allan deviation may reveal the application of implicit and/or explicit filtering or other correlations on surface topography measurements.
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