Abstract
The correlation of chemical valence, occupied site and the solid solubility of Mn in Ba0.67Sr0.33MnxTi1−xO3 thin films are investigated by X-ray diffraction and X-ray photoelectron spectroscopy technologies. The chemical shifts of Ba3d, Sr3d, Ti2p and O1s dependence of Mn content in the films were systemically collected and studied. The results reveal that the Mn replace Ti preferentially in the Ba0.67Sr0.33MnxTi1−xO3 thin films and can occupy A-site as well as B-site substituting Ba and Ti, respectively, while excess Mn ion is introduced in the thin films. The solid solubility of B-site substitution in Ba0.67Sr0.33MnxTi1−xO3 thin films is about 0.04.
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