Abstract
We report a characterization of hard amorphous carbon films prepared by a new method: high-energy (ca. 30 keV) bombardment with CH 3 + and CH 4 + ions. The results of AES and EELS reveal that almost 60% of the atoms are in sp 2 sites and are consistent with the hypothesis that the microscopic structure of the films consists of an intricate network of small amorphous graphite-like sheets connected by sp 3-rich zones. Raman spectroscopy and SIMS results are also discussed.
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