Abstract
A four-points-inner-pinned ring-shaped microelectromechanical systems (MEMS) resonator has been investigated. The simulated comparison between disk- and ring-shaped resonators indicates that the amplitudes of the ring-shaped resonators are more than ten times larger than those of the disk-shaped ones for modes with the same resonant frequency. Three types of anchor configuration for the ring-shaped resonators, inner-pinned, outer-pinned, and center-fixed, were compared. The results show that, for the inner-pinned ring-shaped resonator, three fundamental resonant modes occur close to each other, although this resonator is the smallest and does not suffer from the effect of misalignment as a result of one mask fabrication. A new method to identify each fundamental resonant mode has been proposed and successfully adapted for evaluating the frequency characteristics of fabricated resonators. The fabricated ring-shaped resonator had a radial-contour-common (RCC) resonant mode at 1.615 MHz with a Q-factor of over 30,000. These values agreed at 98.9% accuracy with those of the simulated resonator.
Published Version
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