Abstract
Microwave Kinetic Inductance Detectors (MKIDs), just like a planar resonance cavity resonating at a microwave frequency, are emerging as a kind of high-sensitivity detector suitable for large format arrays at terahertz (THz) wavelengths. There are two types of MKIDs, namely distributed (or antenna-coupled) MKIDs and lumped-element MKIDs (aka LeKIDs). Various superconducting thin films (such as Al, TiN, NbTiN, NbN, and Nb) have been investigated for MKIDs. They do work so long as the detected photon energy exceeds their energy gap, but their response and noise behaviors are yet to be fully understood. Here we report on the design, fabrication, and characterization of distributed and lumped-element MKIDs made of NbTiN superconducting film. Detailed simulation and measurement results will be presented.
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