Characterization of beryllium-implanted GaAsP/GaP strained-layer superlattice structure

Abstract

A dynamic model is presented based on Takagi's theory of dynamic diffraction of a distorted crystal, which incorporates depth-dependent strain and spherically symmetric gaussian distribution of random displaced atoms. The analysis of X-ray rocking curves using this model provides damage and strain depth distributions for ion-implanted strained-layer superlattices. This model has been used to interpret an experimental logarithmic (400) X-ray diffraction intensity vs. 2θ angle profile of a 75 keV beryllium-implanted GaAsP/GaP strained-layer superlattice structure reported in the literature.