Abstract

A novel process called Liquid Source Misted Chemical Deposition (LSMCD) was used to synthesize Al-doped LiMn 2O 4 cathode films for Lithium microbatteries. The cathode films were characterized by XRD, SEM, cyclic volatmmetry, and charge/discharge test. LiMn 1.8Al 0.2O 4 film crystallized at 800 °C in rapid thermal annealing (RTA) for 5 min under oxygen atmosphere exhibited more improved electrochemical rechargeability than spinel LiMn 2O 4 film because the substitution of Al 3+ for Mn 3+ increased MnO bonding strength in the spinel framework and suppressed the two-phase behavior of the unsubstituted spinel during the intercalation/deintercalation that is the origin of the failure mechanism in the 4 V region. As a result, LiMn 1.8Al 0.2O 4 film showed an initial discharge capacity of 52 μAh/cm 2 μm and no capacity fade over 100 cycles.

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