Abstract
In order to improve the understanding of pulsed laser deposition (PLD) of diamondlike carbon (DLC) films, we have initiated a detailed study of the plasma dynamics of laser produced carbon plasmas. The carbon plasma is produced by focusing a Nd:YAG laser pulse, 380 mJ, 4 ns at 1.06 μm, onto a graphite target, at a background pressure of 0.3 mTorr. Time resolved optical emission spectroscopic (OES) observations of the carbon plasma plume are obtained, with time and space resolution, using a SpectraPro 275 spectrograph, with a 15 ns MCP gated OMA. Line emission from CII to CIV carbon ions is identified at different stages of the plasma evolution. Line intensity ratios of successive ionization stages, CIII/CIV, was used to estimate the electron temperature throughout the Saha-Boltzmann equation, under the assumption of local thermodynamic equilibrium (LTE), and Stark broadening of CII lines was used to obtain measurements of the electron density. Characteristic plasma parameters, short after plasma formation, are 3.0 eV and 2-1017 cm−3which after 60 ns of plasma expansion decay to 2.7 eV and 5·10 cm−3, respectively.
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