Abstract
A new confocal three-dimensional micro X-ray fluorescence (3D micro-XRF) facility based on polycapillary X-ray optics in the detection channel and Kirkpatrick–Baez (KB) mirrors in the excitation channel is designed. The lateral resolution ( l x , l y ) of this confocal three-dimensional micro-X-ray fluorescence facility is 76.3( l x ) and 53.4( l y ) µm respectively, and its depth resolution d z is 77.1 μm at θ = 90°. A plant sample (twig of B. microphylla) and airborne particles are analyzed.
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