Abstract
A confocal technology based on polycapillary X-ray optics is proposed to perform three-dimensional energy-dispersive micro X-ray diffraction. A three-dimensional energy-dispersive micro X-ray diffractometer based on a polycapillary focusing X-ray lens (PFXRL) in the excitation channel and a polycapillary parallel X-ray lens (PPXRL) in the detection channel has been designed. At 2\theta = 90^ \circ, the lateral resolution l_X \times l_Y of this diffractometer is 49.7 \times 49.9 \rm \micro m at 7.5 keV, and its depth resolution d_Z is 48.1 \rm \micro m at 8.0 keV. The total resolution of this diffractometer in \Delta d/d is 6.5% at 6.4 keV and 2\theta = 140.2^ \circ.
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