Characterization and Reissue of SRM 2063 Thin-Film Glass Standard

Abstract

X-ray energy-dispersive spectrometry (EDS) is an essential tool for chemical analysis .with an electron microscope. Quantification of an acquired spectrum is typically preformed using a “relative elemental sensitivity factor” or “k factor” approach. Because of differing instrumental and detector configurations, detector efficiencies and ionization cross sections, these sensitivity factors must be determined for individual instruments. SRM 2063 is the reissue of a thin film Standard Reference Material of known chemical composition, density, thickness, stability, and homogeneity to provide characteristic x-ray peak locations and intensities for elements in the 1 - 8 keV region. The experimental procedure utilizes several different techniques to characterize the samples and limit analytical bias.The original issue of SRM 2063 was produced by NIST personnel at a commercial laboratory using their ion beam deposition system. For the reissue of SRM 2063, a 10 cm diameter ion beam deposition system was acquired by NIST and used to sputter a fully characterized silicon, magnesium, calcium, and iron glass.