Abstract
A study of circular piezoelectric micro speakers is presented for applications in the audio frequency range, including values for impedance, admittance, noise figures, transducer gain, and acoustic frequency responses. The micro speakers were modelled based on piezoelectric micro ultrasonic transducer (pMUT) design techniques and principles. In order to reach the audio frequency range, transducer radii were increased to the order of one centimetre, whilst piezoelectric layer thicknesses ranged the order of several μm. The micro actuators presented might be used for a variety of electroacoustic applications including noise control, hearing aids, earphones, sonar, and medical diagnostic ultrasound. This work main contribution is the characterization of the design space and transducer performance as a function of transducer radius, piezoelectric layer thickness, and frequency range, looking towards an optimized fabrication process.
Highlights
Multimedia systems and components such as micro speakers are elements of great interest for the research community, driven by the needs of mobile phone, entertainment, laptop, tablets, and computer industries
An s-parameter analysis was used for impedance, admittance, noise figure, and transducer gain calculation
The results presented characterise the transducer design space and yield information and details on impedance, resonance frequency, noise figure, and transducer gain as a function of frequency, piezoelectric layer thickness, and transducer radius
Summary
Multimedia systems and components such as micro speakers are elements of great interest for the research community, driven by the needs of mobile phone, entertainment, laptop, tablets, and computer industries. It has been long time since “full range” multimedia micro speakers are trying to be developed, often finding design conflicts limited by fundamental physics. Some studies concerning micro speakers of the moving coil type have been reported in [1,2,3,4] Within this type of speakers, performance was improved after modifying magnetic characteristics [2], optimizing diaphragm pattern design via a finite element approach [5] or introducing a combined permanent magnet [4]. Moving-coil is a well-matured technology, and probably best for mid- or low-frequency range loudspeaker units, the voice coil and the magnet do produce coupling interactions and nonlinearities difficult to deal with [6, 7], introducing complexity in the design
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