Abstract
A flat panel micro speaker was fabricated from (K, Na) NbO3 (KNN)-based multilayer piezoelectric ceramics by a tape casting and cofiring process using Ag-Pd alloys as an inner electrode. The interface between ceramic and electrode was investigated by scanning electron microscope (SEM) and transmission electron microscope (TEM). The acoustic response was characterized by a standard audio test system. We found that the micro speaker with dimensions of 23 × 27 × 0.6 mm3, using three layers of 30 μm thickness KNN-based ceramic, has a high average sound pressure level (SPL) of 87 dB, between 100 Hz–20 kHz under five voltage. This result was even better than that of lead zirconate titanate (PZT)-based ceramics under the same conditions. The experimental results show that the KNN-based multilayer ceramics could be used as lead free piezoelectric micro speakers.
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