Abstract
This paper presents measurement and FEM (Finite Element Method) analysis of metal adhesion force to a parylene substrate for implantable neural probe. A test device composed of 300 nm-thick gold and 30 nm-thick titanium metal electrodes on top of parylene substrate was prepared. The metal electrodes suffer from delamination during wet metal patterning process; thus, CF4 plasma treatment was applied to the parylene substrate before metal deposition. The two thin film metal layers were deposited by e-beam evaporation process. Metal electrodes had 200 μm in width, 300 μm spacing between the metal lines, and 5 mm length as the neural probe. Adhesion force of the metal lines to parylene substrate was measured with scotch tape test. Angle between the scotch tape and the test device substrate changed from 60° to 90° during characterization. Force exerted the scotch tape was recorded as the function of displacement of the scotch tape. It was found that a peak was created in measured force-displacement curve due to metal delamination. Metal adhesion was estimated 1.3 J/m2 by referring to the force peak and metal width at the force-displacement curve. Besides, the scotch tape test was simulated to comprehend delamination behavior of the test through FEM modeling.
Highlights
Many research efforts have been made to develop and improve of the prosthetic hands and arms for the amputees, and, in recent years, much progress has been observed in the development of life-like robotic hands and the means of controlling them with greater degree of freedom
The adhesion of metal electrodes to parylene substrate was measured by the scotch tape test
Thin and long metal electrodes was patterned on a parylene substrate in which the surface was modified by CF4 plasma etch before the metal deposition through e-beam evaporation
Summary
Many research efforts have been made to develop and improve of the prosthetic hands and arms for the amputees, and, in recent years, much progress has been observed in the development of life-like robotic hands and the means of controlling them with greater degree of freedom For this purpose, micro-electro-mechanical systems (MEMS) technologies have been used to fabricate neural interface probes [1,2,3,4,5,6]. Scotch tape test has been frequently used to estimate adhesion force of metal layers to polymer substrates [18,19,20]. Metal adhesion to parylene substrate has been characterized by using scotch-tape test and it has been analyzed based on Finite Element Method (FEM) modeling.
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