Abstract
Secondary cells, which are the core storage media of energy storage systems (ESS), and carbon nanowalls (CNWs), which are expected to improve the performance of supercapacitors while being used as their electrodes, were investigated in this study. CNWs were directly grown on the substrate, and the substrate was a Si wafer with a nickel layer deposited on top of it. The nickel layer was deposited with the RF-magnetron sputtering method using a 4-inch Ni target. The CNWs were grown on the prepared substrate using microwave plasma-enhanced chemical vapor deposition (PECVD). The substrate temperature was changed from 550 to 800°C by 50°C increments to identify the growth characteristics according to the growth temperature. The surficial and cross-sectional images according to the temperature were analyzed using a field emission scanning electron microscope (FE-SEM). It was confirmed that the density of the CNWs increased along with the temperature. Especially, it was confirmed that the density increased dramatically at 750°C or higher.
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