Abstract
The characteristics of a thickness-vibration-mode PZT transducer for acoustic micropumps are evaluated with a U-shaped tube structure. The phenomenon in which the height of the water level can be increased in a U-shaped tube due to the acoustic driving force was used to develop measurement methods for the output pressure and flow rate of the acoustic micropump driven by a PZT transducer. The measurement results showed that the output pressure increases from 22.6 to 37.6 Pa and the flow rate increases from 3.6 to 6.4 ml/min when input voltages of 68–105 Vpp are applied to the PZT transducer and the height of water level is 30 cm above the PZT transducer. To discuss the effect of backpressure, the output characteristics of pressure and flow at water height levels of 31 and 32 cm were measured for comparison with those at 30 cm.
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