Abstract

A prototype linear ultrasonic motor using normal vibration and tangential vibration modes of an elliptical shape stator was fabricated and studied in this research. The composite structure of the stator is formed by two multilayer piezoelectric actuators clamped in an elliptical elastic body. The geometry of the stator has been computed with the help of the finite element analysis. The dimensions of the stator's structure were determined by making the two resonance frequencies close to each other. Two modes of normal and tangential vibration degenerate at the dimensional ratio of major axis and minor axis diameter equal to about 1.6 for coincidence of two resonance frequencies when the thickness is 6 mm and the width is 3 mm. The construction and some operational characteristics of the linear motor are presented. The maximum moving speed of the prototype was about 180 mm/s when applying 11 Vp driving voltage by using two signal driving method.

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