Abstract
There have been a number of methods proposed and investigated for the correction of the spherical aberration, since this aberration is one of the most important factors which limit the performance of various kinds of electron beam instruments. A foil lens has been investigated preliminarily and the possibility of correcting the spherical aberration of a conventional magnetic lens with reasonable ease has been shown for the first time.The foil lens studied consists of an aperture diaphragm and a thin conducting foil fundamentally as is shown in Fig. 1, and is simple enough in design and adjustment. When the voltage is applied between the diaphragm and the foil, the curved potential distribution is produced around the aperture and the foil lens acts as a concave or negative lens. This concave lens produces the negative spherical aberration and can be utilized to correct the positive spherical aberration of the conventional magnetic lens.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Proceedings, annual meeting, Electron Microscopy Society of America
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
