Abstract
There have been a number of methods proposed and investigated for the correction of the spherical aberration, since this aberration is one of the most important factors which limit the performance of various kinds of electron beam instruments. A foil lens has been investigated preliminarily and the possibility of correcting the spherical aberration of a conventional magnetic lens with reasonable ease has been shown for the first time.The foil lens studied consists of an aperture diaphragm and a thin conducting foil fundamentally as is shown in Fig. 1, and is simple enough in design and adjustment. When the voltage is applied between the diaphragm and the foil, the curved potential distribution is produced around the aperture and the foil lens acts as a concave or negative lens. This concave lens produces the negative spherical aberration and can be utilized to correct the positive spherical aberration of the conventional magnetic lens.
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More From: Proceedings, annual meeting, Electron Microscopy Society of America
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