Abstract
To validate the possibility of the developed microwave plasma source with a novel structure for plasma aerosol deposition, the characteristics of the plasma flow velocity generated from the microwave plasma source were investigated by a Mach probe with pressure variation. Simulation with the turbulent model was introduced to deduce calibration factor of the Mach probe and to compare experimental measurements for analyses of collisional plasma conditions. The results show calibration factor does not seem to be a constant parameter and highly dependent on the collision parameter. The measured plasma flow velocity, which witnessed fluctuations produced by a shock flow, was between 400 and 700 m/s. The optimized conditions for microwave plasma assisted aerosol deposition were derived by the results obtained from analyses of the parameters of microwave plasma jet. Under the optimized conditions, Y2O3 coatings deposited on an aluminum substrate were investigated using scanning electron microscope. The results presented in this study show the microwave plasma assisted aerosol deposition with the developed microwave plasma source is highly feasible for thick films with >50 μm.
Highlights
The aerosol deposition (AD) method, which is based on the impact adhesion of fine particles for the formation and micro-patterning of thick ceramic layers on substrates, is a novel coating technique for preparing thick ceramic films at room temperature [1,2,3]
Using μ-plasma aerosol deposition (PAD), with the optimized mized conditions of the microwave plasma source (MPS), Y2O3 coatings were deposited on an aluminum substrate, conditions the MPS, Y2 Oinvestigated were deposited onmicroscope an aluminum
A power urement of the plasma flow velocity generated from the developed MPS for μ-PAD
Summary
The aerosol deposition (AD) method, which is based on the impact adhesion of fine particles for the formation and micro-patterning of thick ceramic layers on substrates, is a novel coating technique for preparing thick ceramic films at room temperature [1,2,3]. MPS generates plasma jets without coatings using a a microwave any need for electrodes, which can solve problems such as impurities from melting the plasma source (MPS) [14] has various advantages, studies on the application of MPS to electrodes of a thermal arc plasma source It produces lower flux densities than plasma aerosol deposition (PAD) are insufficient. An MPS with a novel structure for PAD where forming a coating by a PAD technique involves melting and accelerating particles was developed as a plasma generator using ignition in a surface wave discharge in a low at high velocity toward a substrate. Y2 O3 coating layer was investigated by scanning electron microscope (SEM)
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