Abstract
Focused ion beams (FIBs) are of importance as direct write tools in the microelectronics industry, and beams containing Er ions are of importance for optoelectronics applications. Microstructures doped with Er are attractive because of their intra-4f transition of Er3+ at a wavelength of 1.54μm, which corresponds to the minimum of attenuation of optical wave-guides. We describe the electric characteristics and mass spectra of two liquid metal alloy ion sources; namely Er70Fe22Cr3Ni5 and Er69Ni31. For the first time in the literature the energy spread of triply charged ions (Er 3+) is reported.
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