Abstract
Diffraction gratings of arbitrary periods have been fabricated by the two-beam interference method using photosensitive ZrO2 gel films and characterized. The ZrO2 gel films were formed on Si or silica glass substrates from sols that were derived from Zr-butoxide modified chemically with benzoylacetone. The gel films were irradiated with two interference beams from a He-Cd laser (325 nm) and then leached in ethyl alcohol. The above process gave uniform surface-relief gratings of periods ranging from 1.0 to 0.5 μm, depending on the incidence angle of the interference beams. The diffraction efficiency, measured in the Littrow configuration using a He-Ne laser (633 nm), showed polarization dependence for the grating of 0.5 μm period but not for the gratings of 1.0 μm period. The maximum diffraction efficiency was 18% for the grating of 1.0 μm period and 28% for that of 0.5 μm period in the reflection mode. The present study has proved that the photosensitive gel films are versatile in fabrication of optical devices.
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