Fabrication of Gratings Using Photosensitive Gel Films by Sol-Gel Process

Abstract

In this study we synthesized the metal chelate complexes of Si, Al and Zr by the chemical modification. The photosensitive gel films on silicon and quartz substrates with chelate complexes as precursor were fabricated using sol-gel method. The hologram gratings of 2000 lines/mm were obtained by the use of a two-beam interference laser on the photosensitive gel films, which were exposed to the interference fringe of 325 nm He-Cd laser beams. After laser irradiation, the gel films were leached in alcohol, and heat-treated at 500 °, the organism was volatilized and the grating became into inorganic films that combined with the substrates firmly. This paper also studied the characteristics of UV spectrum and IR spectrum of the photosensitive gel films, and their variations in the process of laser irradiation and heat treatment in high temperature. Through the way above, the photosensitization mechanism and the characteristic of chemical structure of the thin films were investigated; also the diffraction efficiency was studied.