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Abstract
We evaluated the characteristics of Cu–Zr thin film metallic glasses (TFMGs) fabricated using a carousel-type sputtering system. In this system, it is easy to synthesize samples and control their alloy composition by controlling the radio-frequency power for each target independently. In the present study, we demonstrated the fabrication of Cu–Zr TFMGs and evaluated their thermal properties. Cu–Zr samples of various compositions showed a glass transition; however, the thermal properties of the Cu–Zr TFMGs depended on the sputter rate of each element. At the least, the sputter rate of each element during a single rotation of the substrate was set to less than the respective atomic diameter in order to obtain Cu–Zr TFMGs with a stable glass transition.
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