Abstract
The demand for high performance, integrity, and miniaturization in the area of electronic and mechanic devices has drawn interest in the fabrication of nanostructures. However, it is difficult to fabricate the channel with nano-scale using a conventional photography techniques. AFM anodization technique is a maskless process and effective method to overcome the difficulty in fabricating a nano-scale channel. In this paper, we first present a new fabrication of a single-channel SFFT using a selective oxidation process induced by an AFM probe. The modified channel was investigated by electron probe microanalyzer (EPMA) to find the compositional variation of the transformed region. In order to confirm the operation of a single-channel SFFT, we measured the voltage–current characteristics at the temperature of liquid nitrogen by an I– V automatic measurement system. Our results indicate that the single-channel SFFT having effect as a weak link is effectively fabricated by an AFM lithography process.
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