Abstract
A small microwave ion source has been fabricated from a quartz tube with one end enclosed by a two-grid accelerator. The source is also enclosed by a cavity operated at a frequency of 2.45 GHz. Microwave power as high as 500 W can be coupled to the source plasma. The source has been operated with different geometries and for various gases in a cw mode. For hydrogen, ion current density of 200 mA/cm2 with atomic species concentration as high as 80% has been extracted from the source. It has been demonstrated that low-energy oxygen ion beams can also be extracted from the source. Beam-energy spread has been measured to be less than 1 eV.
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