Abstract
The characteristics of output voltages and non-linearities of a silicon circular diaphragm pressure sensor using the piezoresistance effect are analysed for high-pressure measurements. The pressure sensor is analysed, using triaxial stresses and their corresponding piezoresistance coefficients, by a finite-element method (FEM). Radial and tangential stresses on the circular diaphragm, calculated by the FEM at a pressure of 50 MPa, shift by about 125 MPa to the compressive side from those calculated by plate theory of a fixed periphery. Moreover, the perpendicular stress (z stress) component to the diaphragm surface is not negligible at high pressure in either calculation. The results calculated by the FEM agree well with the experimental results. A pressure sensor for high-pressure measurements from 0 to 50 MPa is then designed and fabricated. It has a non-linearity within +or-0.1%.
Published Version
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