Abstract
Metastable WMeC (MeFe, Co) films were obtained by non-reactive RF magnetron sputtering. Their initial state and thermal stability were studied by means of electron probe microanalysis, secondary ion mass spectrometry and X-ray diffraction. The results show that the structure at room temperature depends on the percentage of iron and cobalt in the films, varying from β-WC 1− x to amorphous with the increasing content of these elements. The structure of the crystalline films changes with temperature from β-WC 1− x to WC and W 2C. The crystallization mechanism of the amorphous films is characterized by the formation of carbon-deficient phases, such as W 2C or M 6C.
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