Abstract
At the nanoscale, there are often very complex relationships among input design parameters and process or product outputs. It would be prohibitively time consuming to perform all of the combinatorially possible experiments in order to comprehend these relationships. However, statistical design of experiments (DoE) is a technique that can be used to efficiently explore the relationships and develop greater understanding. Consequently, DoE is becoming increasingly central to the advancement of nanotechnology and nanomanufacturing.
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