Abstract
This chapter describes the main tools and instrumentations that are necessary in the field of nanoscience. The role of microscopy is integral to the study of the morphology and topography of nanostructured devices for the characterization of material surfaces. There is extensive use of microscopy with a high-resolution in natural science, medical science, engineering, and numerous other areas. Microscopes with high-resolutions are utilized at nanoscale. In engineering and materials science, surface images can be obtained from optical and electron microscopes. The various phenomena and underlying sciences related to microscopy are discussed along with its different types and limitations. For better understanding electron interactions with samples and their imaging, scanning and transmission electron microscopes are also described in detail. To examine the surface profile of a sample at nanoscale, atomic force and scanning tunneling are useful. Some other techniques like the fluorescence method, synchrotron radiation, and atom probe instrumentation are also described in detail.
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