Abstract
Thermal evaporation in vacuum was the first widely used vacuum coating process. Evaporation is principally achieved by resistive heating of a filament or crucible or by electron beam heating. Deposition may be performed in a good vacuum to maintain the composition of the evaporant or may be done in a reactive gas to deposit a compound material. Presently major applications of evaporation are where a high rate of vaporization is desired such as coating strip steel, optical coatings including mirrors, decorative coatings, and thin film photovoltaics. In many applications sputter deposition has replaced thermal evaporation.
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