Abstract

Scanning nonlinear dielectric microscopy (SNDM) has been employed to determine linear permittivity on the nanoscale. This chapter describes the use of both cantilever- and needle-type SNDM to obtain quantitative linear permittivity data. Of particular interest is a novel cantilever-type SNDM developed by the authors’ group, referred to as ∂C/∂z-mode SNDM or ∂C/∂z-SNDM. This technique substantially lowers deleterious stray capacitance effects and thus permits quantitative imaging of linear permittivity in conjunction with enhanced spatial resolution. The present discussion examines imaging using this technique in conjunction with higher-harmonic responses and provides information regarding quantitation and spatial resolution.

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