Chapter 3 - Advanced characterization techniques for nanostructures

Abstract

This chapter presents many of the advanced techniques that can be used for visualizing and interacting with nanoscaled features. The techniques presented here fall into the three main categories of topology, internal structure and compositional investigation. Topological techniques presented here include field emission scanning electron microscopy (FESEM), scanning probe microscopy (SPM) and optical microscopy (confocal and NSOM). Internal structure techniques presented include transmission electron microscope (TEM), magnetic resonance force microscope (MRFM) and X-ray diffraction (XRD). Compositional techniques presented include X-ray photoelectron spectroscopy (XPS), energy dispersive X-ray spectroscopy (EDS), secondary ion mass spectroscopy (SIMS) and Auger electron spectroscopy (AES). In order to highlight the current capabilities and applications of these techniques, case studies from recent literature are presented.