Abstract
This chapter first reviews the properties of various thermoplastic polymers and how these polymers react in vacuum. The chapter then discusses critical process considerations including interaction with emission from plasma, thermal stress, water adsorption and desorption, and other general concerns for vacuum coating polymers. State-of-the-art vacuum processes for coating, as well as new results of research and development in the fields of wet-chemical coatings and antireflective structures, will be introduced and described.
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