Cc, Cs, and parasitic correction in quadrupole probe-forming lenses

Abstract

Approximate expressions are derived for the second and third order aberrations of a quadrupole doublet, allowing for aberrations intrinsic to fields of perfect symmetry, for parasitic aberrations of imperfect symmetry, and for compensating multipole lenses. Five third-order coefficients are found, and expressed in terms of four octopole strengths and the first-order parameters of the doublet as determined by its dimensions. For compensation of third-order aberrations of achromatic quadrupole/octopole lenses, either skew octopole lenses are required externally, or lenses with more than 8 poles are required coincident with the quadrupoles. If an octopole lens is added between the quadrupoles of the achromatic doublet, the spherical aberration of a condenser lens may be compensated. Such a Cs and Cc compensated quadrupole doublet is suitable for use as a probe-forming lens in focused ion beam systems and ion microscopes.