Abstract
Cathodoluminescence (CL) spectroscopy in a scanning electron microscope has been used to investigate the radiation-sensitive defect structure of the buried amorphous oxide layer produced by oxygen ion implantation in silicon (Si⟨1 0 0⟩) in comparison with bulk amorphous silicon dioxide (a-SiO2). CL microanalysis allows the defect structure of the buried oxide (BOX) layer to be investigated without removal of the silicon-on-insulator (SOI) top layer. CL emissions are observed at 1.63, 2.10, 2.31 and 2.66 eV and are associated with silicon clusters and nanoparticles that form in the BOX as a result of the post-implantation, high-temperature anneal. CL emission at ∼3 eV may be associated with excess silicon and/or inclusions of high-pressure crystalline SiO2 polymorph (coesite) in the BOX near the SiO2–Si substrate. A partially resolved CL emission may also be observed at 1.88 eV and is possibly associated with a native non-bridging oxygen defect of SiO2. CL emission from the confined strained BOX is dominated by defects associated with large surface-to-volume ratio nanoscale silicon clusters and their interfaces. CL spectra from the in situ BOX are electron radiation sensitive. Electron irradiation results in localized trapped charge-induced electric fields which are enhanced within the strained confined BOX layer at nanoscale silicon cluster defects and interfaces. These enhanced electric fields and residual strain near the interfaces can contribute to breakdown of the BOX.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.