Cathodic electrodeposition of mixed oxide/hydroxide precursor for lead-zirconate titanate thin films

Abstract

The cathodic electrodeposition of thin films greenlings of PbZrxTi1−xO3 (PZT) from an aqueous electrolyte is studied. The principle of the technique is the hydrolization and co-precipitation of soluble ionic titanium-, zirconium-and lead compounds by electrochemical generation of OH on the substrate electrode. The applied potential or current density, respectively, strongly influence the deposition rate. Layers with a thickness in the 10 microns range can easily be achieved. The results show that the key factor for deposition is the surface pH and that the process is over a wide range of electrochemical conditions mass transport controlled. While the substrate material not noticeably affects the deposition, the substrate surface roughness has a strong influence on the adhesion of the deposition layer.