Abstract
Heavy ion-beam sputtering with low beam voltage was found to be applicable for the preparation of long-lived carbon stripper foils. A test foil (25 μg/cm 2) made by this method survived an integrated ion current of 6213 mC/cm 2 corresponding a lifetime of about 200 times the best commercially available foil made by evaporation-condensation. The present method can be expected to be applicable to magnetron sputtering for mass production of carbon stripper foils.
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