Caracterización estructural y morfológica de superredes de Fe/Ti por reflectividad de rayos X y microscopía electrónica de transmisión de alta resolución

Abstract

Multilayers and superlattices consist of stacked thin films made of different materials, including magnetic and non-magnetic ones. These structures are used to produce electronic and spintronic sensors. Thin films are primarily grown using the sputtering technique. This study presents a superlattice with six stacks or periods (N=6) in the nanostructure: Glass/Ti(4.1 nm)/[Fe(2.3 nm)/Ti(1.8 nm)/Fe(2.3 nm)/Ti(4.1 nm)][6] grown by magnetron sputtering. The thickness and roughness of the sample were determined using low-angle X-ray reflectivity (XRR). In addition, a lamella was prepared using focused ion beam (FIB) for morphological analysis by high-resolution transmission electron microscopy (HRTEM). The values obtained from X-ray reflectivity were consistent with those obtained from HRTEM, allowing the growth process optimization of Fe/Ti thin films for the development of new kind of magnetic devices.