Capacitive slanted-beam three-axis accelerometer: II. Characterization

Abstract

Three-axis accelerometers based on four separate seismic masses, each one suspended on a slanted beam, have previously been theoretically shown to have identical resolution and frequency responses in all directions. New simulation and models for this type of accelerometers have been developed and these are verified with measurements of the g-vector, shaker measurements and optical modal analysis. The measurements show good agreement with the new models. The results also show that the slanted-beam topology is a promising alternative for future three-axis accelerometer designs.