Abstract
Capacitive alcohol gas sensors using a porous silicon (PS) layer were fabricated and investigated for the measurement of breath alcohol concentration. Since the PS layer shows high adsorption against ethanol along with a large internal surface area, detecting low alcohol gas concentrations without any heating may be realized in comparison with metal oxide sensors. In this work, we measured the capacitance for the range of 0–0.5% alcohol concentrations using the proposed sensors, and observed how illumination of UV light affected the sensitivity. In addition, the effect of CO2 and N2 gases involved commonly in exhaling breath was estimated, and the same experiment for methanol gas was executed to compare qualitatively with ethanol gas.
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