Abstract
In this work, a capacitance-type alcohol gas sensor using porous silicon layer is developed to apply for breath alcohol measurement and its characteristics are estimated at room temperature. Current alcohol sensors using metal oxides such as tin-oxide are not only difficult to measure low alcohol concentration, but also should heat at to improve the sensitivity. But the sensor using porous silicon layer has good sensitivity even at room temperature by very large effective surface area and suitable structure to fabricate integrated micro sensors. In the experiment, the capacitance was measured for the range of 0 to alcohol concentration with the interval of , in which alcohol solution was kept at 25, 36, and by a heater. As the result, good linearity was observed and the capacitance increased about 1.1, 2.6 and per the increment of alcohol concentration each temperature, respectively, at the frequency of 120 Hz.
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