Abstract
The problem of extraction of information from the capacitance measurement between a Gaussian rough surface and a controlled electrode is studied with 2D numerical simulations. It is shown that with a plane electrode it is possible to obtain information on the standard deviation of the height, but not on the correlation length. With a corrugated, periodic electrode, on the other hand, information on the correlation length can be obtained without much difficulty, but the determination of the rms value of the height variations of the surface is limited due to poor depth resolution. Considerations of the results of numerical calculations of Gaussian randomly rough surfaces with a plane electrode and with a corrugated electrode suggest a simple method of obtaining the statistics of this type of surface.
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